PROBE STATION
Vacuum(Hot/Cool) Chamber Prober



System introduction
The Temperature Variable Prober is a Probe Station that can measure by changing the temperature in vacuum conditions.
Room Temperature, High Temperature, Low Temperature options available to measure in vacuum conditions.
Notable solutions to automatically measure the change in the device by syncing with the analyzer.
Thermal and InGaAs Detector according to customers’ requests also provided.
Various options are also available from manual to motorized for the manipulator.
Specification:
- Chuck Size : 200mm or 300mm(Display Type 제공 가능)
- Temperature range : -12°C ~ +130°C
- Temperature resolution : ±0.5°C
- Utility : 200V DC, 150W
- Option : Pressure Gauge, N2 Auto Refill , Vacuum Pump, Vibration Table, Motorized Manipulator
Manual Positioner


System introduction
The Manual Positioner is an essential tool in a Probe-Station, and can be used securely with precise probing utilizing a 125-250um Screw.
Able to exchange the front Bracket with different needles and various pins.
Options available to choose between vacuum and magnetic for securing methods.
Specification:
- Material : Aluminum
- Stroke : XYZ Axis(12mm)
- Screw Resolution : 0.125~0.25mm
- Size : (W)70 x (D)100 x (H) 90
- Utility : Vacuum(50KPa) or Magnetic