주식회사 아이프리시전

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THERMAL/PHOTON INSPECTION

Thermal inspection total solution

System introduction

A solution to location defections through a highly-functional thermal camera.
Total Solution is provided by propelling the Display Device to take measurements that can be adjusted depending on the frequency changes.

High Power Transistor Measurement

Micro-LED Sample Test

Touch Panel Short Sample Image

Overlay Image Process
(Marked only Areas with High Level of Intensity)

Overlay Image Process

Interface Thermal Lock-in Solution

Items	Functions	Note
Camera Spec.	Various detector type and resolution options available according to customers’ requests	Insb Camera
Dual Measurement	Able to detect electric properties as well as defections using the Detector Camera
Low - High Magnification	Able to detect low to high magnification according to customers’ requests	고객과 사양 협의 후 결정
Manual or Auto Mode	Able to measure by probing through recipe if the area to be measured is large	불량 조건 설정, 측정 후 GUI에 표시 및 저장
Vision Image Processing	Image Overlay of Real Image and Defective Image Magnified/Diminished Intensity of Measurement Area Able for Image Conjunction after In-contact Measurement Able to measure just the desired area that user wants to measure by real-time screen Real-time temperature graph displayed
Tester and Interface	Able to Sync Tester and Modify GUI according to customers’ needs Solution (Lock-in, Trigger, etc..) provided allowing detection of intricate defects by syncing with Tester according to the defection conditions	Detector Camera Tester Interface (H/W or S/W)
Other Application Examples	Display(LCD, OLED, Micro-LED) Semiconductor (Wafer, Package) Power-Device(Electric Apparatus Component)

Manual Prober System (Thermal/Photon )

Thermal manual prober System introduction

The Thermal Manual Prober System uses a highly sensitive Thermal Camera that detects interior heating of semiconductor devices. The Thermal Manual Prober System can rapidly and accurately detect semiconductors’ defection locations by displaying detected heat burns in overlapping patterns.

Specification:

Chuck Size : 200mm
Chuck Material : Nickel plated
Stage Stroke : XY Axis(200mm)Z Axis(10mm) , Theta(Fine theta manual movement ± 3°)
Optic Stage Stroke : XYZ Axis(±50mm)
Isolation Table : 3 Auto Leveling Valve, Natural Frequency of System : Vertical : 1.2~1.5Hz
Optic Unit : 4 or 5Hole Turret, Probing View Camera
Option : Hot Chuck (Temp 200 Celsius)
Size : (W)960 x (D)985 x (H) 1,800
Utility : CDA(0.5MPa), Vacuum(50KPa)

Photon manual prober System introduction

The Photon Manual Prober System is a very sustainable system that can measure DC (I-V, C-V) and RF, as well as be utilized in various other areas, which provides accurate probing through an easy operation.
It is possible to measure 200mm and 300mm Wafer Loading and Partial Wafer, and Chip Unit Samples, and provides probing that utilizes the Probe Card and Positioner. Overall, the measurement Tester and Interface support and measurement accessories are provided.
Top Side Manual System is the best Probing System that can be upgraded in various ways through the customer request application.

Specification:

Chuck Size : 200mm
Chuck Material : Nickel plated
Stage Stroke : XY Axis(200mm)Z Axis(10mm) , Theta(Fine theta manual movement ± 3°)
Optic Stage Stroke : XYZ Axis(±50mm)
Isolation Table : 3 Auto Leveling Valve, Natural Frequency of System : Vertical : 1.2~1.5Hz
Optic Unit : 4 or 5Hole Turret, Probing View Camera
Option : Hot Chuck (Temp 200 Celsius)
Size : (W)960 x (D)985 x (H) 1,800
Utility : CDA(0.5MPa), Vacuum(50KPa)