Specification
| Panel Size | Max 65 inch 대응(고객 요청 시 다른 사이즈 대응 가능) |
|---|---|
| Precision Stage Unit | X/Y/Z/Theta |
| Motion System | Gantry Linear System |
| Camera Unit | C-CCD, InGaAs, Thermal, Probing View |
| Optic Unit | 5Hole Motorized Turret (5x, 10x, 20x, 50x NIR Lens) |
| Size | (W)2,200 x (D)1,750 x (H) 2,400 |
| Utility | CDA(0.7MPa), Vacuum(0.5MPa), Power(3Phase AC220V±10% 6Kw) |
| Panel Size | Max. 65 inches (other sizes available on request) |
|---|---|
| Precision Stage Unit | X/Y/Z/Theta |
| Motion System | Gantry Linear System |
| Camera Unit | C-CCD, InGaAs, Thermal, Probing View |
| Optic Unit | 5Hole Motorized Turret (5x, 10x, 20x, 50x NIR Lens) |
| Size | (W)2,200 x (D)1,750 x (H) 2,400 |
| Utility | CDA(0.7MPa), Vacuum(0.5MPa), Power(3Phase AC220V±10% 6Kw) |