RF Probe Station
System introduction
RF Probe Station은 반도체 소자에 고주파(RF) 신호를 인가하고, 소자에서 발생하는 S-Parameter, Gain, Loss, Impedance, Noise 및 RF 특성을 정밀하게 측정·분석하기 위한 반도체 측정 장비입니다
Wafer 또는 개별 Die 상태에서 RF Probe를 이용하여 Device에 직접 접촉하고, VNA(Vector Network Analyzer), Signal Generator, Spectrum Analyzer, SMU 등의 계측기와 연동하여 DC부터 GHz~수백 GHz 영역까지 다양한 RF Device 특성을 측정할 수 있습니다.
RF Probe Station
System introduction
The RF Probe Station applies high-frequency signals to semiconductor devices and precisely measures S-parameters, gain, loss, impedance, noise, and other RF characteristics. Using RF probes, it directly contacts wafers or individual dies and interfaces with a VNA, signal
generator, spectrum analyzer, SMU, and other instruments for device characterization from DC through GHz and sub-THz ranges.
Specification
| Chuck Size | 200mm (10mm~300mm, PCB 등 고객 요청에 따라 변경 가능) |
|---|---|
| Probe Type | Double Side Prober (Top, Back) |
| Chuck Material | Nickel plated |
| Stage Stroke | XY Axis(200mm)Z Axis(10mm) , Theta(Fine theta manual movement ± 3°) |
| Optic Stage Stroke | XYZ Axis(±50mm) |
| Isolation Table | 3 Auto Leveling Valve, Natural Frequency of System : Vertical : 1.2~1.5Hz |
| Optic Unit | 4 or 5Hole Turret, Probing View Camera |
| Option | NCF 시스템(미세 열을 감지 하기 위한 I-PRECISION에서 자체 개발) |
| Size | (W)960 x (D)985 x (H) 1,800 |
| Utility | CDA(0.5MPa), Vacuum(50KPa) |
| Chuck Size | 200mm (10mm–300mm or PCB, customizable on request) |
|---|---|
| Probe Type | Double Side Prober (Top, Back) |
| Chuck Material | Nickel plated |
| Stage Stroke | XY Axis(200mm)Z Axis(10mm) , Theta(Fine theta manual movement ± 3°) |
| Optic Stage Stroke | XYZ Axis(±50mm) |
| Isolation Table | 3 Auto Leveling Valve, Natural Frequency of System : Vertical : 1.2~1.5Hz |
| Optic Unit | 4 or 5Hole Turret, Probing View Camera |
| Option | NCF System (I-PRECISION proprietary micro-heat detection) |
| Size | (W)960 x (D)985 x (H) 1,800 |
| Utility | CDA(0.5MPa), Vacuum(50KPa) |