Specification
| Chuck Size | 100mm |
|---|---|
| Chuck Material | Nickel plated |
| Stage Stroke | XY Axis(200mm)Z Axis(10mm) , Theta(Fine theta manual movement ± 3°) |
| Optic Stage Stroke | XYZ Axis(±50mm) |
| Isolation Table | 3 Auto Leveling Valve, Natural Frequency of System : Vertical : 1.2~1.5Hz |
| Optic Unit | 4 or 5Hole Turret, Probing View Camera |
| Size | (W)960 x (D)985 x (H) 1,800 |
| Utility | CDA(0.5MPa), Vacuum(50KPa) |
| Chuck Size | 100mm |
|---|---|
| Chuck Material | Nickel plated |
| Stage Stroke | XY Axis(200mm)Z Axis(10mm) , Theta(Fine theta manual movement ± 3°) |
| Optic Stage Stroke | XYZ Axis(±50mm) |
| Isolation Table | 3 Auto Leveling Valve, Natural Frequency of System : Vertical : 1.2~1.5Hz |
| Optic Unit | 4 or 5Hole Turret, Probing View Camera |
| Size | (W)960 x (D)985 x (H) 1,800 |
| Utility | CDA(0.5MPa), Vacuum(50KPa) |